diff --git a/VYaml.SourceGenerator/VYamlIncrementalSourceGenerator.cs b/VYaml.SourceGenerator/VYamlIncrementalSourceGenerator.cs
index de9ddc2..609c786 100644
--- a/VYaml.SourceGenerator/VYamlIncrementalSourceGenerator.cs
+++ b/VYaml.SourceGenerator/VYamlIncrementalSourceGenerator.cs
@@ -69,7 +69,7 @@ class Comparer : IEqualityComparer<(GeneratorAttributeSyntaxContext, Compilation
 
     public bool Equals((GeneratorAttributeSyntaxContext, Compilation) x, (GeneratorAttributeSyntaxContext, Compilation) y)
     {
-        return x.Item1.TargetNode.Equals(y.Item1.TargetNode);
+        return x.Item1.TargetNode.IsEquivalentTo(y.Item1.TargetNode);
     }
 
     public int GetHashCode((GeneratorAttributeSyntaxContext, Compilation) obj)
diff --git a/VYaml.Tests/Parser/YamlParserTest.cs b/VYaml.Tests/Parser/YamlParserTest.cs
index 3fed6a6..9e624c9 100644
--- a/VYaml.Tests/Parser/YamlParserTest.cs
+++ b/VYaml.Tests/Parser/YamlParserTest.cs
@@ -1,3 +1,4 @@
+using System;
 using System.Buffers;
 using System.Collections.Generic;
 using System.Text;
diff --git a/VYaml.Tests/Serialization/SerializerTest.cs b/VYaml.Tests/Serialization/SerializerTest.cs
index 7d9f269..8468dfd 100644
--- a/VYaml.Tests/Serialization/SerializerTest.cs
+++ b/VYaml.Tests/Serialization/SerializerTest.cs
@@ -1,3 +1,4 @@
+using System;
 using System.Linq;
 using NUnit.Framework;
 using VYaml.Internal;
@@ -150,5 +151,13 @@ public void DeserializeHighDigitNumber()
             Assert.That(documents["id2"], Is.InstanceOf<int>());
             Assert.That(documents["id3"], Is.InstanceOf<double>());
         }
+
+        [Test]
+        public void Deserialize_Empty()
+        {
+            var empty = new ReadOnlyMemory<byte>(Array.Empty<byte>());
+            var result1 = YamlSerializer.Deserialize<dynamic>(empty);
+            Assert.That(result1, Is.Null);
+        }
     }
 }
diff --git a/VYaml.Unity/Assets/Tests/Parser/YamlParserTest.cs b/VYaml.Unity/Assets/Tests/Parser/YamlParserTest.cs
index 3fed6a6..9e624c9 100644
--- a/VYaml.Unity/Assets/Tests/Parser/YamlParserTest.cs
+++ b/VYaml.Unity/Assets/Tests/Parser/YamlParserTest.cs
@@ -1,3 +1,4 @@
+using System;
 using System.Buffers;
 using System.Collections.Generic;
 using System.Text;
diff --git a/VYaml.Unity/Assets/Tests/Serialization/SerializerTest.cs b/VYaml.Unity/Assets/Tests/Serialization/SerializerTest.cs
index 7d9f269..8468dfd 100644
--- a/VYaml.Unity/Assets/Tests/Serialization/SerializerTest.cs
+++ b/VYaml.Unity/Assets/Tests/Serialization/SerializerTest.cs
@@ -1,3 +1,4 @@
+using System;
 using System.Linq;
 using NUnit.Framework;
 using VYaml.Internal;
@@ -150,5 +151,13 @@ public void DeserializeHighDigitNumber()
             Assert.That(documents["id2"], Is.InstanceOf<int>());
             Assert.That(documents["id3"], Is.InstanceOf<double>());
         }
+
+        [Test]
+        public void Deserialize_Empty()
+        {
+            var empty = new ReadOnlyMemory<byte>(Array.Empty<byte>());
+            var result1 = YamlSerializer.Deserialize<dynamic>(empty);
+            Assert.That(result1, Is.Null);
+        }
     }
 }
diff --git a/VYaml.Unity/Assets/VYaml/Runtime/Serialization/YamlSerializer.cs b/VYaml.Unity/Assets/VYaml/Runtime/Serialization/YamlSerializer.cs
index d4437af..c0aed71 100644
--- a/VYaml.Unity/Assets/VYaml/Runtime/Serialization/YamlSerializer.cs
+++ b/VYaml.Unity/Assets/VYaml/Runtime/Serialization/YamlSerializer.cs
@@ -132,6 +132,7 @@ public static T Deserialize<T>(ref YamlParser parser, YamlSerializerOptions? opt
             contextLocal.Reset();
 
             parser.SkipHeader();
+            if (parser.End) return default!;
 
             var formatter = options.Resolver.GetFormatterWithVerify<T>();
             return contextLocal.DeserializeWithAlias(formatter, ref parser);
diff --git a/VYaml/Serialization/YamlSerializer.cs b/VYaml/Serialization/YamlSerializer.cs
index d4437af..c0aed71 100644
--- a/VYaml/Serialization/YamlSerializer.cs
+++ b/VYaml/Serialization/YamlSerializer.cs
@@ -132,6 +132,7 @@ public static T Deserialize<T>(ref YamlParser parser, YamlSerializerOptions? opt
             contextLocal.Reset();
 
             parser.SkipHeader();
+            if (parser.End) return default!;
 
             var formatter = options.Resolver.GetFormatterWithVerify<T>();
             return contextLocal.DeserializeWithAlias(formatter, ref parser);